http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101470783-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3563 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-3563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate | 2012-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101470783-B1 |
| titleOfInvention | Method for measuring carbon concentration in polycrystalline silicon |
| abstract | The present invention provides a method which can measure the approximate concentration of substitutional carbon impurities at a desired position in a polysilicon rod easily and simply. The plate-shaped polycrystalline silicon is cut out from the polycrystalline silicon rod, and the both surfaces of the plate-shaped polycrystalline silicon are mirror-polished to have a thickness of 2.12 ± 0.01 mm. A calibration curve was prepared by infrared absorption spectroscopy using a standard single crystal silicon sample having a thickness of 2.00 占 .0.01 mm, in which the substitutional carbon concentration was known, and a calibration curve was prepared according to a standard measurement method. The calibration curve including the absorption band peaks of the substitutional carbon of the plate- The infrared absorption spectrum of the waveguide region is obtained under the same conditions as those in the preparation of the calibration curve, and the substitutional carbon concentration is obtained without performing the thickness correction. |
| priorityDate | 2011-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.