| abstract |
The present invention relates to a ceramic member which is a sintered body in which boron nitride is contained as a constituent and boron nitride is oriented in one direction, a probe holder formed by using a ceramic member, and a method of manufacturing the ceramic member. The ceramic member has a degree of orientation index of 0.8 or more. As a result, it is possible to provide a ceramic member having a high thermal expansion coefficient close to silicon and having high strength, a probe holder formed using the ceramic member, and a method of manufacturing the ceramic member. |