http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101467889-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a957dbb6ea01f200ba4815ee06e48973 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-151 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate | 2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f7d9c316889565e17851999a0dd6981 |
| publicationDate | 2014-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101467889-B1 |
| titleOfInvention | Manufacturing apparatus of non-reflective filter and manufacturing method using the same |
| abstract | An apparatus for manufacturing a non-reflective uninterruptible filter (100) according to the present invention includes a drum (120) provided to be rotated inside a main chamber (110). A substrate (51) is mounted on the drum (120). The main chamber (11) is mounted therein with a cleaning sputter cathode (130), a high refractive sputter cathode (140), a low refractive sputter cathode (150), and an uninterruptible sputter cathode (160). A method for manufacturing the non-reflective uninterruptible filter according to the present invention is achieved by the apparatus for manufacturing the non-reflective uninterruptible filter. A surface (E) and a rear surface (G) of the substrate (51) are deposited after being cleaned so the deposition rate may be improved. Since a high refractive thin film (53), a low refractive thin film (55), and an uninterruptible thin film (57) formed on the substrate (51) are simultaneously processed inside the main chamber (110), productivity may be improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101813676-B1 |
| priorityDate | 2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123105 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530175 |
Total number of triples: 18.