http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101462593-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 |
| filingDate | 2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101462593-B1 |
| titleOfInvention | Evaporation material feeding apparatus |
| abstract | Disclosed is an evaporation material feeding apparatus for improving the fairness. According to an embodiment of the present invention, there is provided a method of feeding a vaporized material for improving processability, including heating a vaporized material in advance before feeding the vaporized material to a source; And an evaporation material injecting step of injecting the preheated evaporation material into the source. |
| priorityDate | 2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.