http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101460086-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate | 2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101460086-B1 |
| titleOfInvention | Process for recycling a substrate |
| abstract | A process for recycling a support substrate (25) of a material that is substantially transparent at least at the wavelength of electromagnetic radiation, comprising the steps of: a) providing an initial substrate (10); b) forming an intermediate layer (15) on the bonding surface of the support substrate (25) with an initial roughness, the intermediate layer being a material substantially transparent at least at the wavelength of the electromagnetic radiation; c) forming (S2) an electromagnetic radiation absorbing layer (24) on one of the bonding surface (10b) of the initial substrate (10) and / or on the intermediate layer (15) 10) to the support substrate 25 through the electromagnetic radiation absorbing layer 24 and e) to induce separation of the support substrate 25 from the initial substrate, (S4) of irradiating the electromagnetic radiation absorbing layer (24) through the intermediate layer (25) and the intermediate layer. |
| priorityDate | 2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.