http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101456458-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78f586b7e40e2e65c7260d0fb0eaf314 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2013-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fcc59cacf5221beda081261eee2f8e8 |
| publicationDate | 2014-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101456458-B1 |
| titleOfInvention | Improved Apparatus and Method of Supplying HMDS, and Improved Apparatus and Method of Suplying Chemical Liquid |
| abstract | The present invention discloses an improved HMDS supply apparatus and method, and an improved chemical liquid supply apparatus and method. The HMDS supply device according to the present invention comprises an HMDS supply container filled with liquid HMDS; A bubbling tank connected to the HMDS supply vessel; A nitrogen supply unit connected to the HMDS supply vessel and the bubbling tank, respectively; And an HMDS coating chamber connected to the bubbling tank and supplied with HMDS gas vaporized from the liquid HMDS and applied on the substrate, wherein the liquid HMDS remaining in the bubbling tank is used for applying the HMDS And the HMDS supply container is replaced with a new HMDS supply container while the HMDS gas is supplied into the chamber. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112174082-A |
| priorityDate | 2013-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.