http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101453350-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2006-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101453350-B1 |
| titleOfInvention | Chemical amplification type resist composition and method for producing the same |
| abstract | (A) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; (B) a resin in which the solubility in an alkali developer is changed under the action of an acid; (C) a basic compound; (D) a surfactant; And (E) a solvent, comprising the steps of: preparing a solution containing the component (A); Andn n n A method for producing a chemically amplified composition comprising a step of mixing a solution containing the component (A) with the components (B) to (E), and a chemically amplified resist composition produced by the method. |
| priorityDate | 2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 154.