http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101451928-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5351c62aee4203f2be2944f21a6def2 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2014-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c81db8d1a8fab5ee884bb0ff1f196be8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_827f992b1fd5a77f17b7a31738ad98ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4c6044236e5e98f3e751b37edd6755f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8c1797442d70b5e5eebc4dcb5c3a245 |
| publicationDate | 2014-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101451928-B1 |
| titleOfInvention | Semiconductor device and thin film transistor comprising multi-layered metal oxide thin films, and method for fabricating the same |
| abstract | The present invention relates to a semiconductor device and a thin film transistor having a multilayered metal oxide thin film, and a manufacturing method thereof. A semiconductor device according to an embodiment of the present invention includes: a substrate; A first metal oxide thin film layer formed on the substrate; And a second metal oxide thin film layer formed on the first metal oxide thin film layer, wherein the first metal oxide thin film layer may have a lower carrier concentration than the second metal oxide thin film layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11201214-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017061838-A1 |
| priorityDate | 2014-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 249.