| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2499
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-7761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D11-138 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101447922-B1 |
| titleOfInvention |
Vapor delivery device, methods of manufacture and methods of use thereof |
| abstract |
The method includes the step of delivering a first stream of carrier gas to a delivery apparatus comprising a solid precursor compound. The first stream of carrier gas is at a temperature of at least 20 < 0 > C. The method further comprises transferring a second stream of carrier gas to a downstream point of the delivery device. The first stream and the second stream are combined to form a third stream such that the dew point of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream, and the flow direction of the third stream are unidirectional and do not face each other. |
| priorityDate |
2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |