http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101447921-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-7761 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D11-138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101447921-B1 |
| titleOfInvention | Vapor delivery device, methods of manufacture and methods of use thereof |
| abstract | The method includes the step of delivering a first stream of carrier gas to a delivery apparatus comprising a solid precursor compound. The first stream of carrier gas is at a temperature of at least 20 < 0 > C. The method further comprises transferring a second stream of carrier gas to a downstream point of the delivery device. The first stream and the second stream are combined to form a third stream such that the dew point of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream, and the flow direction of the third stream are unidirectional and do not face each other. |
| priorityDate | 2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.