http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101434084-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C21-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2011-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101434084-B1 |
| titleOfInvention | Evaporation mask, and production method and production apparatus for organic el element using evaporation mask |
| abstract | The deposition mask 70 includes a first layer 71, a second layer 72 and a third layer 73 in this order. A plurality of first openings 71h, a plurality of second openings 72h and a plurality of third openings 73h are formed in the first layer, the second layer and the third layer, respectively. The first opening, the second opening, and the third opening constitute the mask opening 75 in communication with each other. The opening dimension of the second opening is larger than both the opening dimension of the first opening and the opening dimension of the third opening. This makes it possible to prevent the opening dimension of the mask opening from becoming smaller or clogging the mask opening due to deposition of the deposition particles. |
| priorityDate | 2010-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.