http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101433899-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2008-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101433899-B1 |
| titleOfInvention | METHOD FOR FORMING METAL LAYER OF SUBSTRATE ETCHING AND SUBSTRATE AND STRUCTURE HAVING METAL LAYER USED THEREFOR |
| abstract | The present invention provides a method of forming a metal layer in an etched portion of a substrate. Specifically, a method of forming a metal layer in an etched portion of a substrate includes: forming an etched portion having a vertical surface by etching the substrate; forming a diffusion material layer on a surface of the etched portion; Forming a seed layer diffused below the surface of the etch, and forming a metal layer on the seed layer. According to the above-described method, since the surface characteristics of the substrate etching portion are improved by the seed layer, a metal layer having excellent adhesion and a uniform thickness can be formed on the vertical surface of the etching portion.n n n n Substrate, etch, metal layer, scallop, DRIE, heat treatment, diffusion |
| priorityDate | 2008-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.