http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101430101-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2220-31 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02C7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01D25-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01D17-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2013-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101430101-B1 |
| titleOfInvention | Semiconductor device inspection apparatus |
| abstract | The device inspection apparatus according to the embodiment of the present invention is a device for inspecting an element by transferring an element transferred from a loading section to a test section and a shuttle plate for transferring an element transferred from a test section to an unloading section, The shuttle plate on which the device is mounted can be easily replaced when the type of the device to be inspected, particularly, the size of the device, is changed. |
| priorityDate | 2012-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.