http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101420126-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2012-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101420126-B1 |
| titleOfInvention | Film growth apparatus and film growth method |
| abstract | Provided are a film forming apparatus and a film forming method capable of suppressing fragmentation of the liner and heating the substrate efficiently and with a fine temperature control. The film forming apparatus 100 includes a chamber 1, a liner 2 for partitioning the inner wall 1a of the chamber 1 and the space A, a main heater 9 for heating the substrate 7 from below, And an auxiliary heater 18 disposed between the liner 2 and the inner wall 1a for heating the substrate 7 from above. The main heater 9 and the auxiliary heater 18 are both resistive heating type heaters. The auxiliary heater 18 has a first auxiliary heater 18a, a second auxiliary heater 18b and a third auxiliary heater 18c. The first auxiliary heater 18a heats the substrate 7 in cooperation with the main heater 9. The second auxiliary heater 18b and the third auxiliary heater 18c heat the liner 2 with an output lower than that of the first auxiliary heater 18a. |
| priorityDate | 2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.