http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101417986-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-424 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 |
| filingDate | 2007-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101417986-B1 |
| titleOfInvention | Electric copper plating bath |
| abstract | An electroplating bath for use in filling a through-hole formed on a substrate with copper, comprising an aqueous copper salt, a sulfuric acid, a chloride ion and a brightener as a additive, a carrier and a leveler, wherein the leveler is cationized in a solution An electrolytic copper plating bath comprising at least one water-soluble polymer containing carbon monoxide, nitrogen, tertiary nitrogen, or all of them. The copper plating plugability of the electroplating bath for filling non-through holes formed on the substrate by copper plating can be improved by changing the ratio of the quaternary nitrogen and the tertiary nitrogen of the leveling water-soluble polymer, It can be easily adjusted according to the size, and electroplating can be performed in accordance with the through holes of various sizes.n n n Electricity, Copper, Plating, Brightener, Carrier, Leveler, Nitrogen, Semiconductor chip, Beer hole, Through hole. |
| priorityDate | 2007-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001073182-A |
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467931614 |
Total number of triples: 20.