http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101412507-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_213ec414eed9602185480ab4e464221b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2013-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5982eb51474fd9fd98929d2b81f847b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8194f8b9557b093f11a3213341e5ced3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_797a40fa16cc5429f00e86067834840e |
| publicationDate | 2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101412507-B1 |
| titleOfInvention | Supplier of Gas Phase Organometal Compound |
| abstract | TECHNICAL FIELD The present invention relates to an organometallic compound gas supply device, and more particularly, to a case having an internal accommodation space; A raw material container having a wrinkle, which is located in an inner accommodation space of the case and accommodates a solid organometallic compound; A carrier gas supply pipe for supplying a carrier gas to the raw material container; And a carrier gas discharge pipe through which the organometallic compound-containing gas generated in the raw material container is discharged. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7273665-B2 |
| priorityDate | 2013-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.