http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101412329-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F228-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2010-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101412329-B1 |
| titleOfInvention | Radiation-sensitive resin composition, polymer and resist pattern formation method |
| abstract | The present invention relates to a radiation-sensitive resin composition which can obtain a good pattern shape, is excellent in MEEF performance and is free from defects such as bridges, a polymer suitably used for the radiation-sensitive resin composition, and a radiation- (A) at least one structural unit selected from the group consisting of a plurality of structural units represented by the following formulas (1-1) and (1-2), respectively I), a polymer having a fluorine atom content of 5 mass% or more, a polymer having a [B] acid dissociable group, a fluorine atom content of less than 5 mass%, and a radiation- . |
| priorityDate | 2009-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 343.