http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101404094-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L5-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate | 2012-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101404094-B1 |
| titleOfInvention | Pressure sensor and manufacturing method thereof |
| abstract | The present invention provides a pressure sensor with a small size, excellent sensitivity and a simplified manufacturing process. According to an aspect of the present invention, there is provided a pressure sensor including: a substrate having a cavity formed therein; A pressure-receiving layer positioned on the substrate to seal the cavity, the pressure-receiving layer being deformed by external pressure; And a pressure sensing layer that protrudes from the substrate in the cavity and is located below the pressure receiving layer and senses the pressure as the electrical resistance value changes due to residual stress generated by the deformation of the pressure receiving layer. |
| priorityDate | 2012-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.