http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101402733-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 |
| filingDate | 2012-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101402733-B1 |
| titleOfInvention | Pattern forming method, active ray-sensitive or radiation-sensitive resin composition, resist film, method of manufacturing electronic device, and electronic device |
| abstract | (i) a resin containing (A) a repeating unit having a group capable of decomposing by the action of an acid and capable of generating a polar group, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and (C) (Ii) a step of exposing a film; and (iii) a step of developing the exposed film using an organic solvent-containing developer to form a negative pattern : Wherein the content of the repeating unit represented by the following general formula (I) is less than 20 mol% based on the total repeating units in the resin (A), and the content of the resin (A) And a repeating unit having a biphenolic aromatic group other than the repeating unit represented by the following formula (1). |
| priorityDate | 2011-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 211.