| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101397504-B1 |
| titleOfInvention |
Active radiation-sensitive or radiation-sensitive resin composition and pattern-forming method using the same |
| abstract |
According to one embodiment, the actinic ray or radiation-sensitive resin composition comprises a resin that decomposes upon the action of an acid to increase its solubility in an alkali developing solution, a compound that generates an acid upon irradiation with an actinic ray or radiation, 1). ≪ / RTI > |
| priorityDate |
2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |