http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101393599-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-10 |
| filingDate | 2007-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101393599-B1 |
| titleOfInvention | Etchant composition for metal wirings for TFT-LCD |
| abstract | The present invention relates to an etchant composition used for etching a metal layer for an electrode of a thin film transistor liquid crystal display (TFT-LCD), which comprises 55 to 75% by weight of phosphoric acid, 0.75 to 1.99% 10 to 20% by weight of acetic acid, 0.05 to 0.5% by weight of an Mo etching control agent, 0.02 to 3% by weight of a boron compound, and a residual amount of water. Using the etchant composition for a TFT-LCD of the present invention, the Mo / AlNd double layer or the Mo / Al / Mo triple layer, which is a gate and a source / drain wiring material, is wet etched by a single process to form an undercut ), And an excellent tapered etching profile can be obtained without projecting, and by eliminating the dry etching process, the process can be smoothly performed, productivity can be improved, and production cost can be reduced. Furthermore, the Mo / AlNd double layer or the Mo / Al / Mo triple layer can be wetted once with no harmful substances such as perchloric acid, unstable components that shorten the lifetime of the etching solution, or fluorine- An excellent tapered etching profile can be obtained only by the etching process.n n n n TFT-LCD, Etch, Mo / AlNd, Undercut, Wet Etch |
| priorityDate | 2007-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.