http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101390349-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32055 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101390349-B1 |
| titleOfInvention | Amorphous carbon film, method of forming the same, and method of manufacturing a semiconductor device using the same |
| abstract | The present invention relates to an amorphous carbon film, a method of forming the same, and a method of manufacturing a semiconductor device using the amorphous carbon film.n n n The amorphous carbon film according to the present invention can be formed by introducing an inert gas and a source gas into a chamber, exciting a plasma, stopping the flow of an inert gas, forming an amorphous carbon film with only a source gas, Is formed using a source gas having a single bond (CC) and a vaporized liquid hydrocarbon compound having at least one double bond (C = C).n n n According to the present invention, it is possible to prevent the refractive index and the extinction coefficient of the amorphous carbon film from increasing when the inert gas is continuously introduced into the amorphous carbon film when the amorphous carbon film is formed, thereby improving the reliability of the photolithography process. The reliability of the semiconductor device using the carbon film as the hard mask film can be improved.n n n n Amorphous carbon film, refractive index, extinction coefficient, inert gas, cyclic, single bond, double bond |
| priorityDate | 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.