| abstract |
A method of making a ceramic from an inorganic base material in the form of a powder having a high melting point comprises mixing a second inorganic component with a powder of an inorganic base material, Acting as a dopant. The dopant is composed of a single inorganic material or a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The method of the present invention further comprises a sintering step carried out at a high temperature. The ceramics thus obtained can be advantageously used as target elements due to their high density. The films and electrodes obtained from this ceramic have particularly favorable properties.n n n n Ceramic, target, target element, dopant, sputtering, compression, conductivity, resistivity |