http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101380179-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02293 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101380179-B1 |
| titleOfInvention | Film forming apparatus and film forming method |
| abstract | The substrate is transferred to the inside of the chamber by the robot hand (S101), and transferred to the substrate support (S102). The substrate support is lowered and the substrate is placed on the susceptor (S103). Temperature measurement is performed while rotating a board | substrate (S104). Temperature data and position data are created using the measurement result by a radiation thermometer and the detection result by an encoder (S105). From these, the position shift amount of a board | substrate is calculated | required (S106), and it is determined whether this position shift amount is below an allowable value (S107). If the amount of position shift is larger than the allowable value, after adjusting the position of the robot hand in the transfer chamber (S108), the film formation scheduled substrate is then transferred into the chamber and placed on the susceptor through the substrate support (S109). . |
| priorityDate | 2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.