http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101374090-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02647 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
filingDate | 2008-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101374090-B1 |
titleOfInvention | Epitaxy Methods and Templates Grown by the Methods |
abstract | The present invention provides methods for producing a substantially continuous layer of Group III nitride semiconductor material having low defect densities and optionally having a selected crystal polarity. The methods include seeding and / or epitaxy growth agglomeration over the upper portions of the plurality of pillars / islands of irregularly arranged Group III nitride material over the template structure. The upper portions of the islands have a low defect density and optionally have a selected crystal polarity. The present invention also includes template structures having a substantially continuous layer of masking material through which the upper portions of the pillars / islands are exposed. The present invention can be applied to a wide range of single element and compound semiconductor materials. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735480-B2 |
priorityDate | 2007-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.