| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-3058 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30 |
| filingDate |
2007-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101372848-B1 |
| titleOfInvention |
Metal line grating device manufacturing method |
| abstract |
Forming a self-assembled monolayer nano pattern on the substrate; And forming a metal line grating between the self-assembled monolayer nanopattern nanopatterns using electroless plating on the substrate on which the self-assembled monolayer nanoparticle nanopattern is formed, or using the self-assembled monolayer nanopattern nanopattern as a seed layer. A method of manufacturing a metal line grating device is disclosed, including forming a metal line grating on a pattern. |
| priorityDate |
2007-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |