http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101372710-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02378 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-066 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36 |
| filingDate | 2012-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101372710-B1 |
| titleOfInvention | Large Diameter Single Crystal Growth Device and Growth Method Using the Same |
| abstract | Large-diameter single crystal growth apparatus according to the present invention is equipped with a seed crystal holder and a crucible in which the raw material is charged; A cylindrical quartz tube surrounding the crucible and having upper and lower portions open; A flange for closing the upper and lower portions of the quartz tube; Heating means for heating while surrounding the quartz tube; And a pyrometer configured to be horizontally moved to measure a horizontal temperature deviation of the crucible through the flange outside the quartz tube. The large-diameter single crystal growth apparatus as described above and a growth method using the same, the horizontal temperature deviation of the crucible through the temperature measurement window formed from the center of the flange to the outside while the pyrometer disposed in the upper and lower sides of the crucible is moved in the horizontal direction By measuring, the overall temperature gradient can be easily inferred from the specific point of the upper and lower parts of the crucible. As a result, it is possible to design the design and configuration of the crucible, the heating means, etc., which can reduce the horizontal temperature deviation of the crucible. |
| priorityDate | 2012-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.