http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101371870-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2007-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101371870-B1 |
| titleOfInvention | Silicon Carbide Polishing Method Using Water Soluble Oxidizer |
| abstract | The process of the present invention involves chemical-physical polishing of one or more layers of silicon carbide using a polishing composition comprising a liquid carrier, an abrasive and an oxidant.n n n Chemical-physical polishing, silicon carbide, abrasives, oxidants, liquid carriers |
| priorityDate | 2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 81.