http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101364953-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2011-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101364953-B1 |
| titleOfInvention | Patterned inorganic layer, patterning composition based on radiation and method thereof |
| abstract | The stabilized precursor solution can be used to form the radioactive inorganic coating material. Precursor solutions generally comprise metal suboxide cations, epoxide-based ligands and polyatomic anions. The precursor solution may be designed to obtain a precursor solution of high stability level. The resulting coating material may be designed to pattern with selected radiation such as ultraviolet light, x-ray radiation or electron beam radiation. Since the radiation patterned coating material can have a high contrast with respect to the material properties, the phenomenon of latent image can be successfully formed to form a line having a very low linewidth roughness and an adjacent structure having a very small pitch. |
| priorityDate | 2010-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 72.