| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2010-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101362176-B1 |
| titleOfInvention |
Deposition Methods and Storage Media |
| abstract |
The substrate is accommodated in the processing container, and a film forming material containing cobalt amidate and a reducing agent containing carbonic acid are introduced into the processing container in a vapor phase to form a Co film on the substrate. |
| priorityDate |
2009-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |