| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-36 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B6-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B6-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B3-08 |
| filingDate |
2012-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101360956-B1 |
| titleOfInvention |
Continuous Manufacturing Process and Continuous Reactor for Synthesis of Semiconductor Gas |
| abstract |
The present application relates to a continuous manufacturing process and a continuous reaction apparatus for the synthesis of semiconductor gases comprising germane (GeH 4 ) or arsine (AsH 3 ) gas. |
| priorityDate |
2011-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |