http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101357432-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 |
| filingDate | 2006-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101357432-B1 |
| titleOfInvention | Salts suitable for acid generators and chemically amplified resist compositions containing them |
| abstract | The present invention provides salts of formula (I):n n n n n n n n [Wherein X represents -OH or -Y-OH, n represents an integer of 1 to 9, A + represents an organic counter ion, and Y represents a divalent saturated aliphatic hydrocarbon group having 1 to 6 carbon atoms] .n n n The present invention also provides a chemically amplified resist composition containing a salt of formula (I).n n n Acid Generator, Chemical Amplified Resist Composition |
| priorityDate | 2005-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 250.