| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_db7afe49fd715d4cb0c64f7da1f94e7c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2012-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae198a572e2e3b02e264a9f9fa077171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4e0cdde9a8763decce1e23b4f0b5d09 |
| publicationDate |
2014-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101352164-B1 |
| titleOfInvention |
Method and vacuum system for the removal of metallic by-products |
| abstract |
Performing a deposition process using a metal precursor in the process chamber; Treating the plasma with an exhaust gas comprising a residual metal precursor transferred from the process chamber; Treating metal by-products generated in the plasma treatment step with an oxidizing gas to generate metal oxides; And it provides a method of removing metallic by-products comprising the step of pumping out the metal oxide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101565116-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022092502-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102265878-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I798907-B |
| priorityDate |
2012-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |