abstract |
An aluminum-silicon carbide composite which is preferable as a base plate for a power module is provided.n n n After forming or processing the flat silicon carbide porous body so that the in-plane thickness difference is 100 µm or less, it is sandwiched between the release plates so that the tightening torque in the surface direction is 1 to 20 Nm, and a metal containing aluminum as the main component Consisting of impregnated aluminum-silicon carbide composite,n n n It has aluminum layers which consist of metal which has aluminum as a main component on both main surfaces, The average thickness of the aluminum layer is 10-150 micrometers, The difference between the maximum value and minimum value of the in-plane thickness of an aluminum layer is 80 micrometers or less, The aluminum of both main surfaces The difference in the average thickness of the layer is 50 µm or less, and the silicon carbide porous body has a rectangular shape or a shape in which the outer circumferential portion of the portion surrounding the hole portion is added in a rectangular shape. |