| abstract |
As a ZnO evaporation material used for film formation, such as a transparent conductive film, 1 or 2 or more types of 1st addition elements chosen from Ce, La, Y, Pr, Nd, Pm, Sm, and Al, Ga, Sc, B It contains the 1 type (s) or 2 or more types of 2nd additional element selected, content of a 1st additional element is more than content of a 2nd additional element, and content of a 1st additional element is 0.1-14.9 mass%, and of a 2nd additional element. Mainly a ZnO porous sintered compact in which content is in the range of 0.1-10 mass%. The sintered compact has a porosity of 3 to 50%. |