| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D17-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
2012-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101339759-B1 |
| titleOfInvention |
Guiding device |
| abstract |
An apparatus is provided for leading solid phase precursor compounds into a reactor in the gas phase. Such devices include a precursor composition of a solid precursor compound having a packing material layer arranged thereon. Also provided is a method for delivering saturated carrier gas to a precursor compound for delivery to a CVD reactor. |
| priorityDate |
2004-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |