http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101336100-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-035218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0038 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00 |
| filingDate | 2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101336100-B1 |
| titleOfInvention | Tubular Monocrystalline Silicon Nanostructures and Manufacturing Method Thereof |
| abstract | The present invention relates to a method for producing a single-crystal silicon nanostructure of a tubular vertical columnar structure on a silicon substrate, in particular, such as metal deposition-> rapid heat treatment-> dry etching (RIE) without using a conventional photolithography process The present invention relates to a method of manufacturing a tubular nanostructure that can effectively produce a tubular silicon nanostructure having a large surface ratio per volume and a superhydrophobic property on a large-scale silicon substrate through a three-step simple batching process. |
| priorityDate | 2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.