http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101334859-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2010-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101334859-B1 |
| titleOfInvention | Water repellent additive for immersion resist, resist composition containing water repellent additive, and pattern forming method |
| abstract | What is disclosed is a water-repellent additive for immersion resists consisting of a fluorine-containing polymer having a repeating unit represented by the following General Formula (1). By adding this water repellent additive to a resist composition, it can control so that it may have high water repellency at the time of exposure, and may improve developer solubility at the time of image development. (34) [Wherein, R 1 represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group, R 2 represents a heat labile protecting group, R 3 represents a fluorine atom or a fluorine-containing alkyl group, and W represents a divalent linking group.] |
| priorityDate | 2009-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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