http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101331638-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C321-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C321-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-12 |
| filingDate | 2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101331638-B1 |
| titleOfInvention | Salts suitable for acid generators and chemically amplified resist compositions containing them |
| abstract | The present invention relates to salts of the general formula (L). n Salts of formula (L) n (L) n Wherein Q represents a -CO- group or a -C (OH)-group; Ring X is a monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, wherein at the Q position when Q is a -C (OH)-group, the hydrogen atom is substituted at the Q position or at the Q position when Q is -CO- group Two hydrogen atoms are substituted with ═O group, and at least one hydrogen atom of the monocyclic or polycyclic hydrocarbon group is an alkyl group of 1 to 6 carbon atoms, an alkoxy group of 1 to 6 carbon atoms, a perfluoroalkyl group of 1 to 4 carbon atoms, or 1 to 4 carbon atoms Optionally substituted with a hydroxyalkyl group, hydroxyl group or cyano group of 6; R 10 and R 20 each independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms; A + represents an organic counter ion}. n The present invention also provides a chemically amplified resist composition containing the salt of formula (L). n n Chemically amplified resist compositions, acid generators, resolution, pattern profiles |
| priorityDate | 2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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