http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101331458-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B1-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B15-021 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25B1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2009-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101331458-B1 |
| titleOfInvention | Functional solution supply system |
| abstract | A sulfuric acid electrolyte solution is efficiently generated as a functional solution, and persulfuric acid produced by electrolysis is suppressed from self-decomposition and is efficiently supplied to the use side. A functional solution supply system for producing a functional solution by electrolyzing a sulfuric acid solution and supplying it to a use side, wherein the system stores a storage tank (2) storing a sulfuric acid solution and an electrolytic device (electrolyte cell (3)) for electrolyzing a sulfuric acid solution. And heating means (heater 4) for heating the sulfuric acid solution, cooling means (cooler 4) for cooling the sulfuric acid solution, and sulfuric acid solution discharged from the storage tank 2 without the heating means. The first circulation line 11 which returns to the said storage tank 2 through and the sulfuric acid solution introduce | transduced from the use side (cleaner 1) through a cooling means and the said storage tank 2 in this order, not through a heating means. The second circulation line 12 to be returned to the use side and the sulfuric acid solution introduced from the use side are returned to the use side through a heating means (heater 4) without passing through the cooling means and the storage tank 2. The third circulation line (13) The rain. |
| priorityDate | 2008-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.