http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101324678-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_504aebfdce1cd0c2333ef8acc9fab5e6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3170e75fed38395ae8f04ea1949715f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83ba87f59c817d63f944830e51d16c55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bd868d8a504c9d09eb73b76af26f3cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0fc4cd7a64a33062969e7a22e5f3108 |
| publicationDate | 2013-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101324678-B1 |
| titleOfInvention | Seed etchant comprising a metal halide compound |
| abstract | The present invention relates to an etchant composition capable of selectively etching a seed layer made of nickel, chromium or a nickel-chromium alloy, and more particularly, (A) a first liquid containing hydrochloric acid and a metal halide compound; And (B) an etchant of nickel, chromium or nickel-chromium alloys, which is prepared by mixing a second liquid containing a nitrogen oxide or a salt thereof. The present invention also relates to a method of etching a seed layer using the etchant and a method of supplying an etchant for improving the life and performance of the etchant. |
| priorityDate | 2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.