| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2003-2237 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-58 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-48 |
| filingDate |
2006-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101322045-B1 |
| titleOfInvention |
Silsesquioxane-Titania Interpolymers |
| abstract |
The present invention relates to silsesquioxane-titania interpolymers having a titania domain size of less than about 5 nanometers. Such polymers are useful for forming antireflective coatings, for example in the manufacture of microelectronic devices.n n n Silsesquioxane, titania, interpolymer, antireflective coating |
| priorityDate |
2005-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |