http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101319901-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 |
| filingDate | 2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101319901-B1 |
| titleOfInvention | Manufacturing apparatus and product control method of product having functional membrane |
| abstract | The present invention relates to an apparatus for producing a product having a functional membrane and a method for producing the same. The present invention provides one (single) chamber in which a plasma reaction is performed to provide a functional film to a base material, a cleaning gas supply unit for supplying a cleaning gas for cleaning the base material to the chamber, and for forming the functional film. A precursor supply unit for supplying a precursor to the chamber, a discharge unit for discharging gas inside the chamber to the outside, and pretreatment cleaning, functional film provision, and post-treatment cleaning in the one chamber; An apparatus for manufacturing a product having a functional membrane including a cursor supply unit, the cleaning gas supply unit, and a control unit for controlling the discharge unit is provided. |
| priorityDate | 2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.