http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101303782-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101303782-B1 |
| titleOfInvention | Liquid composition containing aminoether for deposition of metal-containing films |
| abstract | The present invention relates to a) wherein at least one ligand is β-diketonate, β-ketoiminate, β-ketostearate, β-diiminate, alkyl, carbonyl, alkyl carbonyl, cyclopentadienyl, pyrrolyl At least one metal-ligand complex, selected from the group consisting of alkoxides, amidinates, imidazolyls, and mixtures thereof, wherein the metal is selected from elements of Groups 2-16 of the Periodic Table of the Elements; And b) R 1 R 2 NR 3 OR 4 NR 5 R 6 , R 1 OR 4 NR 5 R 6 , O (CH 2 CH 2 ) 2 NR 1 , R 1 R 2 NR 3 N (CH 2 CH 2 ) 2 O, R 1 R 2 NR 3 OR 4 N (CH 2 CH 2 ) 2 O, O (CH 2 CH 2 ) 2 NR 1 OR 2 N (CH 2 CH 2 ) 2 O, and mixtures thereof, wherein R 1-6 are independently C 1 -10 linear alkyl, C 1 -10 branched alkyl, C 1 -10 cyclic alkyl, C 6 -C 10 aromatic, C 1 -10 alkyl amines, C 1 -10-alkyl-amino-alkyl, a C 1 -10 ether, C 4 -C 10 cyclic ether, C 4 -C 10 cyclic amino ether, and the formulation comprises at least one of the amino ether is selected from the group consisting of selected from the group consisting of and mixtures thereof; It is about. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210100804-A |
| priorityDate | 2009-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.