| abstract |
The present invention is useful as a target that can be sputtered without generating arcs or cracks even when a high DC power is applied, and a method for producing an oxide sintered body containing zinc, tin and oxygen, and an oxide transparent conductive film at high speed, and An oxide transparent conductive film excellent in chemical resistance is provided.n n n An oxide sintered body substantially comprising zinc, tin and oxygen, comprising tin in an Sn / (Zn + Sn) atomic ratio of 0.23 to 0.50, consisting mainly of zinc oxide and at least one zinc stannate compound, Composed of at least one zinc stannate compound; After mixing a slurry prepared by blending a zinc stannate compound powder or a raw powder including a mixed powder of tin oxide powder and zinc oxide powder in an aqueous solvent for at least 15 hours, solid-liquid separation, drying, granulation, and then, Provided is a method for producing an oxide sintered body by sintering the molded product obtained by putting the granulated mold in a mold for at least 15 hours at 1300 ~ 500 ℃ in the minor component crisis. |