http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101300266-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00141 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-24 |
| filingDate | 2006-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101300266-B1 |
| titleOfInvention | System for delivery of reagents from solid sources thereof |
| abstract | A system 10 for carrying reagents from a solid source of reagents, wherein the system is confined by at least a portion of its structure for generation of vapor from the solid source material by heating and volatilization of the solid source material 30. Structures 16, 22, 24 arranged to retain the solid source material in a closed state, a heat source 82 arranged to heat the solid source material for such volatilization, and a vapor distribution arranged to withdraw steam from the system Assembly 52, 54. Also disclosed is a high conductance valve 1510 suitable for use as a dispensing control valve for reagent storage and dispensing vessels, such as vessels containing reagents for semiconductor manufacturing dispensed at low pressure. The high conductance valve includes a valve body 1512 with the inlet and outlet passages substantially vertical, the distal ends of which include an optional positionable valve element that is movable between a fully open position and a fully closed position. Communicate with chamber 1536. The valve flow coefficient C v in the range of about 2.7 to 2.9 can be achieved by such a high conductance valve which allows the valve to have good dispensing operation even in regions of extremely low pressure, such as pressures below 20 torr. |
| priorityDate | 2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.