http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101294968-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 |
| filingDate | 2006-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101294968-B1 |
| titleOfInvention | Etching solution composition and etching method using the same |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an etchant composition for collectively etching a metal single layer or a multi-layered film used as a gate electrode and a pixel electrode of a thin film transistor (TFT) of a flat panel display including a thin film transistor liquid crystal display device. 3 ) 3 1-10 wt%, 0.1-2 wt% of fluorine-containing compound, 2-15 wt% of HNO 3 , 0.5-5 wt% of HCl, and 68-96 wt% of water to form a thin film transistor of a flat panel display An etching liquid composition capable of collectively etching a metal single film or a multilayer film used as a wiring and a pixel electrode is provided.n n n n Molybdenum / Aluminum, Indium Oxide, Etch Composition |
| priorityDate | 2006-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.