| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101291821-B1 |
| titleOfInvention |
Method of forming CBD-Ru film and method of manufacturing semiconductor device |
| abstract |
CVD-Ru film is formed by the process of forming a Ru film on a board | substrate by CVD using the film-forming raw material containing an organometallic compound, and the process of carrying out annealing in a hydrogen containing atmosphere with respect to the board | substrate with which the said Ru film was formed. do. |
| priorityDate |
2009-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |