http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101281968-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-02 |
| filingDate | 2006-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101281968-B1 |
| titleOfInvention | Controlled Electrochemical Polishing Method |
| abstract | The present invention relates to a method for polishing a substrate comprising at least one metal layer by applying an electrochemical potential between the substrate in contact with the polishing composition comprising a reducing or oxidizing agent and at least one electrode.n n n Polishing method of the substrate |
| priorityDate | 2005-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 142.