http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101275143-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 |
| filingDate | 2011-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101275143-B1 |
| titleOfInvention | Organoaminosilane precursor and method for depositing a film comprising the same |
| abstract | The present invention relates to precursors and methods of forming dielectric films. In one aspect, a silicon precursor is provided having Formula I: Wherein R 1 in formula (I) is a hydrogen atom, a linear or branched C 1 to C 6 alkyl group, a linear or branched C 2 to C 6 alkenyl group, a linear or branched C 2 to C 6 alkynyl group, C 1 to C 6 Independently selected from alkoxy groups, C 1 to C 6 dialkylamino groups and electron withdrawing groups and n is a number selected from 0, 1, 2, 3, 4, and 5; R 2 is a hydrogen atom, a linear or branched C 1 to C 6 alkyl group, a linear or branched C 2 to C 6 alkenyl group, a linear or branched C 2 to C 6 alkynyl group, a C 1 to C 6 alkoxy group, C 1 to C 6 alkoxy group bonded C 1 to C 6 alkyl group, C 1 to C 6 D in combination with an alkyl group C 1 to C 6 alkyl group, C 1 to C 6 dialkylamino group, C 6 to C 10 aryl group, Independently from C 1 to C 6 linear or branched fluorinated alkyl groups, and C 4 to C 10 cyclic alkyl groups. |
| priorityDate | 2010-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 245.